Industry Pain Points & Needs

1. Zero Contamination：Chip manufacturing is extremely sensitive to particulates and oil contamination; if traditional lubrication equipment leaks, it can result in the costly scrapping of wafers.
2. High Energy Consumption: Electronics manufacturing facilities require uninterrupted 24/7 operation, resulting in electricity costs accounting for a substantial portion of operating expenses.
3. Precision Control: Even minute pressure fluctuations or temperature deviations can impact production yield.

Application Scenarios & Solutions

Scenario 1: HVAC & Cleanroom Control

Solution: To address the high-precision requirements for constant temperature and humidity control in semiconductor fabrication plants, magnetic levitation chillers are employed. These units provide a stable source of chilled water to the Makeup Air Units (MAUs) and Air Handling Units (AHUs), thereby ensuring compliance with the precise temperature control requirements—within ±0.1°C—mandated by photolithography processes.

Why Maglev: Traditional centrifugal chillers are prone to surging and suffer from low energy efficiency under low-load conditions. Magnetic levitation compressors, conversely, demonstrate exceptional performance at partial loads. Furthermore, due to the absence of a lubrication system, no oil film forms within the evaporator or condenser to impede heat transfer; consequently, heat exchange efficiency remains consistently stable over the long term.

Scenario 2: High-Purity Gas & Fluid Transport

Solution: Employ magnetic levitation motor pumps in ultrapure water (UPW) and specialty gas circulation systems to prevent particulate contamination caused by mechanical wear, thereby preserving the ionic purity of the water used for wafer cleaning.

Why Maglev: Magnetic levitation motor pumps operate without mechanical contact and do not generate metallic wear particles. When conveying electronic-grade chemicals or ultrapure water, they ensure the absolute purity of the medium.

Scenario 3: Vacuum Systems & Purging

Solution: Maglev Centrifugal Blower / Compressor, delivering Class 0 oil-free compressed air for wafer drying and pneumatic conveying, ensuring zero residue on the wafer surface.Why Maglev: Purge gas must be absolutely dry and oil-free; otherwise, it will leave oil spots on the wafer surface. The air output from maglev equipment meets the ISO 8573-1 Class 0 standard.

The Value Masco Magnetic Levitation System Delivers to You:

• Yield Rate Improvement: Eliminates environmental risks associated with oil contamination.

• Green Factory: Extremely low power consumption helps enterprises achieve carbon neutrality goals (ESG).

Return on Investment (ROI): Although the initial investment is slightly higher, costs are typically recouped within 1.5 to 3 years through savings on electricity and maintenance expenses.